Device name:PL mapping system
Service price:¥200.0 元/小时
Device model:PLATOM
Device description:It is suitable for measuring the thickness, reflectivity and wafer BOW of gallium nitride, gallium arsenide, indium phosphide epitaxial film details
Device name:Surface defect detector
Service price:¥300.0 元/小时
Device model:Nspec
Device description:High-end automatic micro detection system, which can be applied to material science and life science;Suitable for testing the defects of transparent and semi-transparent waferComplete Mapping and generate reports details
Device name:CV analyzer
Service price:¥100.0 元/小时
Device model:ECVpro
Device description:IIIV GaAs, GaN, IIVI, Si and broadband semiconductor material concentration longitudinal distribution test details
Device name:Thickness meter
Service price:¥10.0 元/分钟
Device model:Dektak 150
Device description:It is mainly used in many fields, such as film thickness measurement, sample surface topography measurement, sample surface roughness/ripple measurement details
Device name:SEM/EDS
Service price:¥200.0 元/小时
Device model:S-3400N
Device description:It is widely used in surface microanalysis of materials details
Device name:XRD
Service price:¥200.0 元/小时
Device model:X'Pert PRO
Device description:Rapid qualitative and semi-quantitative analysis of the structure composition of polycrystalline materials at room temperature; Analysis of small Angle scattering, film thickness and stress distribution. details
Device name:PL荧光光谱量测系统
Service price:¥200.0 元/小时
Device model:RPMBlue
Device description:Suitable for testing the thickness and reflectance of blue/green gallium nitride epitaxial thin films details
Device name:Hall
Service price:¥100.0 元/小时
Device model:HL5500PC
Device description:The resistivity, carrier concentration and mobility of semiconductor materials and epitaxial materials can be tested Application materials: Si, iii-v, ii-vi and wide-band forbidden semiconductor materials details
Device name:PECVD
Service price:¥500.0 元/小时
Device model:800plus
Device description:Suitable for high quality coating of SiO2,SiNx and other materials details
Device name:E-beam Evaporation
Service price:¥300.0 元/小时
Device model:FU-16PEB
Device description:Suitable for high quality steam plating of metal film and dielectric film details
Device name:MOCVD
Service price:¥800.0 元/小时
Device model:2800G4 HT
Device description:Suitable for compound semiconductor epitaxial growth details
Device name:Auto Mask Alinger
Service price:¥600.0 元/小时
Device model:MA100e
Device description:Suitable for compound semiconductor lithography details
Device name:PCVD
Service price:¥500.0 元/小时
Device model:CC-200Cz
Device description:Suitable for high quality coating of SiO2,SiNx and other materials details
Device name:ICP
Service price:¥500.0 元/小时
Device model:NE-550EXz
Device description:Suitable for fine etching of semiconductor materials and metal materials details
Device name:E-beam Evaporation
Service price:¥300.0 元/小时
Device model:ei-5z
Device description:Suitable for high quality steam plating of metal film and dielectric film details
Device name:qwe
Service price:¥0.0 
Device model:qwe
Device description: details